Case Study

Semiconductor Wafer Metrology Tool

Semiconductor manufacturing machines require extremely precise and high speed motion systems.  Our customer trusted our high-performance RMP EtherCAT Motion Controller to deliver the extreme accuracy they needed to succeed.

Details

Compay Name: Private

Date: Private

Website: Private

 

 

 

Motion Controller Highlights

Multi-Axis Coordinated Motion- This application required coordinated streaming path motion so the X, X’, Y, and Z axes could follow a path trajectory.

Deterministic IO trigger within 250µs – The customer required several IO functions to be performed both quickly and deterministically. Our RMP EtherCAT Motion Controller includes several features that enabled them to trigger outputs based on pre-programmed events with 250µs.

Electronic Gearing- Our customer utilized the electronic gearing feature in our RMP EtherCAT Motion Controller to gear the X and X’ axes together and control it as a single gantry axis.

Services Provided by RSI

Custom Control Algorithm Design – RSI assisted in the development of a custom control algorithm which applies a torque bias to opposing motors to eliminate backlash.  Coupled with our Dual Loop Feedback feature, this architecture yielded significantly improved tracking accuracy and performance.

Hardware Selection – RSI assisted with the selection of the servo system including the motors, drives, gearheads, precision encoders, and gear segments to withstand the worst elements of nature.

User Interface

Solution Technologies

  • sRMP EtherCAT Motion Controller
  • Ultra high Precision Angular Encoders
  • Servo Motors
  • High Torque Gearheads
  • EtherCAT Servo Drives

Customer Benefits

  • Extremely reliable control solution for mission critical applications.
  • Custom torque bias control algorithm achieves zero backlash and arc-second system accuracy.
  • Real time OS integration for application development.
  • High performance tracking ability to target objects on Land, at Sea, or in the Air.
Ready to start automating?

customers have automated with help of our products and team.

COMPANY

About Us

Careers

Contact Us

Terms

RESOURCES

Support

Knowledge Base

Community

PRODUCTS

Motion Controller

Automation Services

Collaborative Robot

Robot Retrofit

Sign up to our newsletter

Subscribe to receive news about product update and innovation.

© 2020 Robotic Systems, Inc.

Terms of Service