Case Study

Semiconductor Wafer Metrology Tool

Semiconductor manufacturing machines require extremely precise and high speed motion systems.  Our customer trusted our high-performance RMP EtherCAT Motion Controller to deliver the extreme accuracy they needed to succeed.

Details

Compay Name: Private

Date: Private

Website: Private

 

 

 

Motion Controller Highlights

Multi-Axis Coordinated Motion- This application required coordinated streaming path motion so the X, X’, Y, and Z axes could follow a path trajectory.

Deterministic IO trigger within 250µs – The customer required several IO functions to be performed both quickly and deterministically. Our RMP EtherCAT Motion Controller includes several features that enabled them to trigger outputs based on pre-programmed events with 250µs.

Electronic Gearing- Our customer utilized the electronic gearing feature in our RMP EtherCAT Motion Controller to gear the X and X’ axes together and control it as a single gantry axis.

Services Provided by RSI

Custom Control Algorithm Design – RSI assisted in the development of a custom control algorithm which applies a torque bias to opposing motors to eliminate backlash.  Coupled with our Dual Loop Feedback feature, this architecture yielded significantly improved tracking accuracy and performance.

Hardware Selection – RSI assisted with the selection of the servo system including the motors, drives, gearheads, precision encoders, and gear segments to withstand the worst elements of nature.

User Interface

Solution Technologies

  • sRMP EtherCAT Motion Controller
  • Ultra high Precision Angular Encoders
  • Servo Motors
  • High Torque Gearheads
  • EtherCAT Servo Drives

Customer Benefits

  • Extremely reliable control solution for mission critical applications.
  • Custom torque bias control algorithm achieves zero backlash and arc-second system accuracy.
  • Real time OS integration for application development.
  • High performance tracking ability to target objects on Land, at Sea, or in the Air.

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